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Sevenstar Mass Flow Contoller
Sevenstar Mass Flow Controller CS300 MFC
  • Sevenstar Mass Flow Controller CS300 MFC
  • Sevenstar Mass Flow Controller CS300 MFC
  • Sevenstar Mass Flow Controller CS300 MFC

Sevenstar Mass Flow Controller CS300 MFC

Features 1. High Accuracy and Fast Respond The accuracy of the CS300 MFC has been improved to ±0.8……

Description

Features

1. High Accuracy and Fast Respond

The accuracy of the CS300 MFC has been improved to ±0.8% of S.P., and the most advanced models have a less than 0.5 sec response time.

2. Low Zero Drift and Temperature Coefficient

The invention of new sensor technology enables the CS230 MFC to maintain stability and withstand temperature fluctuations. Without an auto-zero amplifier, the expected zero drift is less than 0.6%F.S./year, and the temperature coefficient is less than 0.02%F.S./℃(zero),0.05%F.S./ ℃ (span).

3.Metal-Sealed Models and High Purity Feature

The special metal surface process is applied in CS300. 316 stainless steel VV is used and rough ness could be less than 5 RA which is required by the semi standards.

4. Compatible Interfaces

The CS300 MFC is compatible with the following interfaces, which may be selected by the customer:±8V-±16V double-end power supply and +14V-+28V single-end power supply; digital or analog signal input and output; SEMI standard mechanical dimensions; and RS-485 or DeviceNetTM communications module.

5. Miscellaneous Functions

Powerful customer software comes standard with each model, while additional functions such as multi-gas,multi-range,auto-zero, alarms, soft start, and delay are available as customer selections.

6. CS300 MFCs support 1.125″, 1.5″ W, C IGS.

Specification

 

CS300

Type

CS310C

CS320C

CS310D

CS320D

Valve Type

Normally Open

Normally Closed

N/A

Normally Closed or Normally Open

N/A

Normally Closed or Normally Open

N/A

Normally Closed or Normally Open

N/A

Full scale

range (N2)

(0~1,2,3,5,10,20,30,50,100,200,300,500) SCCM
(0~1,2,3,5,10,20,30) SLM

Accuracy

Beijing Sevenstar Flow Co., LTD.

Linearity

±0.5% F.S.

Repeatability

±0.2% F.S.

Response

Time

≤ 0.8sec            (≤ 0.5sec  optional)

Differential

Pressure

0.05~0.3MPa
Flow≤5SLM
0.1~0.3MPa
5SLM<Flow≤10SLM
0.2~0.3MPa
Flow>10SLM

0.05~0.35MPa Flow≤10SLM
0.15~0.35MPa  Flow>10SLM

<0.02 MPa

0.05~0.35MPa Flow≤10SLM
0.15~0.35MPa  Flow>10SLM

<0.02 MPa

0.05~0.35MPa Flow≤10SLM
0.15~0.35MPa  Flow>10SLM

<0.02 MPa

0.05~0.35MPa Flow≤10SLM
0.15~0.35MPa  Flow>10SLM

<0.02 MPa

Temperature 

Coefficient

Zero:≤±0.02% F.S./℃; Span:≤±0.05% F.S./℃

Max Pressure

3.5 MPa

1 MPa

3.5 MPa

3.5 MPa

Leak integrity

1×10-11 Pa·m3 / sec He

Seal Materials

Metal

maximum

operating

pressure

0.45MPa

Operation

Temperature

(0~50)℃

Input

Signal

Digital: RS485 or DeviceNetTM or EtherCAT

Analog:(0~5)VDC

N/A

Digital: RS485 or DeviceNetTM or EtherCAT

Analog:(0~5)VDC

N/A

Digital: RS485 or DeviceNetTM or EtherCAT

Analog:(0~5)VDC

N/A

Digital: RS485 or DeviceNetTM or EtherCAT

Analog:(0~5)VDC

N/A

Output

Signal

Digital: RS485 or DeviceNetTM or EtherCAT

Analog:(0~5)VDC

Zero Drift

<0.6%F.S. per year without autozero

Power

Supply

±8~±16 VDC (bipolar) 或 +14~+28 VDC (unipolar)

Surface

Chemistry

Cr/Fe ratio >2.0; CrO thickness >20 Angstroms

Surface

Finish

Ra  5μinch

Fittings

VCR1/4” M
1.125″C Type
1.125″W Type

1.5″B
1.5″C
1.5″W

VCR1/4” M
1.125″C Type
1.125″W Type

1.5″B
1.5″C
1.5″W

Electronic

Connector

9 pin male sub-D ,15 pin male sub-D ,DeviceNetTM male,EtherCAT

Weight

1 Kg

0.8Kg

1.2Kg

1Kg

1 Kg

0.8Kg

1.2Kg

1Kg

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