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Sevenstar Mass Flow Contoller
Sevenstar Mass Flow Controller CS100 MFCs
  • Sevenstar Mass Flow Controller CS100 MFCs
  • Sevenstar Mass Flow Controller CS100 MFCs

Sevenstar Mass Flow Controller CS100 MFCs

CS100 MFCs derive from the CS series, sharing the same technologies, Constant-power Sensor, Digital Sensor Balance and Valve Correct Pedestal Technology. CS100 can be customized to specific requirements. Additionally with Customer Ground Correction (CGC) function CS100 is flexible in different operating environments and eliminate the bad influence to accuracy because of the improper connecting of ground wires.

Description

Features

1. High Accuracy and Fast Response

The accuracy of the CS100 MFC has been improved to ±1.0% of S.P., and its’ response time of less than1 sec.

2. Miscellaneous Functions

Powerful customer software comes standard with each model, while additional functions such as multi-gas,multi-range,auto-zero, alarms, soft start, and delay are available as customer selections.

3. Customization

CS100 can be customized to ±15V double-end or +24V single-end power supply, Rs485 interface, digital or analog input and output, metal seal or elastomer seal, SEMI standard or compact mechanical dimension.

 

Specification

CS100

Type

CS100A

Valve
Rest Position

Normally Closed

No Valve

Full scale range (N2)

(0~10,20,30,50,100,200,300,500)  SCCM
(0~1,2,3,5,10,20,30,50)        SLM

Accuracy

±1.0% S.P. (≥35% F.S.); ±0.35% F.S.(<35% F.S.)

Linearity

±0.5% F.S.

Repeatability

±0.2% F.S.

Response Time

≤ 1sec

Differential Pressure

0.05~0.35MPa; FLOW≤10 SLM
0.1~0.35MPa ; 10<FLOW≤30 SLM
0.25~0.45MPa ; 30<FLOW≤50 SLM

<0.02 MPa

Temperature
Coefficient

Zero: ≤±0.05% F.S/℃;   Span: ≤±0.1% F.S/℃

Max Pressure

3MPa

10MPa

Leak integrity

1×10-9 Pa·m3 / sec He(1×10-8 atm·cc / sec He)

Wetted Materials

Viton

maximum operating pressure

0.45MPa

Operation Temperature

(5~45)℃

Input Signal

Analog:
(0~5)VDC

Digital: RS485

N/A

N/A

Output Signal

Analog:
(0~5)VDC

Digital: RS485

Analog:          (0~5)VDC

Digital: RS485

Electronic Connector 9 pin male
sub-D;
15 pin male
sub-D
9 pin male sub-D;
3 pin male O
15 pin male
sub-D
9 pin male sub-D;
15 pin male sub-D
9 pin male sub-D;
3 pin male O

15 pin male
sub-D

Power Supply

±15V

±15V

+24V

±15V

15V

+24V

ATUO ZERO

SUPPORT

Surface Finish

25μinch Ra

Fittings

Compression Fittingφ6; Compression Fittingφ3;
Compression Fitting1/4´´;Compression Fitting1/8´´;
VCR1/4″male;
Ф6(inner)×1hose;ф5(inner)×1.5hose;ф4(inner)×1hose;

Weight

1.2Kg

1Kg

 

Specification

 

CS100

Type

CS100D

Valve
Rest Position

Normally Closed

No Valve

Full scale range (N2)

(0~10,20,30,50,100,200,300,500)  SCCM
(0~1,2,3,5,10,20,30)           SLM

Accuracy

±1.0% S.P. (≥35% F.S.); ±0.35% F.S.(<35% F.S.)

Linearity

±0.5% F.S.

Repeatability

±0.2% F.S.

Response Time

≤ 1sec

Differential Pressure

0.05~0.35MPa;FLOW≤10 SLM
0.1~0.35MPa;10<FLOW≤30 SLM

<0.02 MPa

Temperature
Coefficient

Zero: ≤±0.05% F.S/℃;   Span: ≤±0.1% F.S/℃

Max Pressure

3MPa

10MPa

Leak integrity

1×10-9 Pa·m3 / sec He(1×10-8 atm·cc / sec He)

Wetted Materials

Metal

maximum operating pressure

0.45MPa

Operation Temperature

(5~45)℃

Input Signal

Analog:
(0~5)VDC

Digital: RS485

N/A

N/A

Output Signal

Analog:
(0~5)VDC

Digital: RS485

Analog:
(0~5)VDC

Digital: RS485

Electronic Connector 9 pin male sub-D;

15 pin male sub-D

9 pin male sub-D;

3 pin male O

15 pin male
sub-D
9 pin male sub-D;

15 pin male sub-D

9 pin male sub-D;

3 pin male O

15 pin male
sub-D
Power Supply

±15V

±15V

+24V

±15V

±15V

+24V

ATUO ZERO

SUPPORT

Surface Finish

25μinch Ra

Fittings

VCR1/4″male

Weight

1.2Kg

1Kg

 

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