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Sevenstar Mass Flow Contoller
Sevenstar Mass Flow Controller CS230 MFCs
  • Sevenstar Mass Flow Controller CS230 MFCs
  • Sevenstar Mass Flow Controller CS230 MFCs

Sevenstar Mass Flow Controller CS230 MFCs

Features 1. High Accuracy and Large Full Scale Range The accuracy of the CS230 MFC has been improv……

Description

Features

1. High Accuracy and Large Full Scale Range

The accuracy of the CS230 MFC has been improved to ±1.0% of S.P., and the full scale of CS230 MFC can be 300slm.

2. Low Zero Drift and Temperature Coefficient

The invention of new sensor technology enables the CS200 MFC to maintain stability and withstand temperature fluctuations. Without an auto-zero amplifier, the expected zero drift is less than 0.6%F.S./year, and the temperature coefficient is less than 0.02%F.S./℃(zero),0.05%F.S./ ℃ (span).

3. Compatible Interfaces

The CS230 MFC is compatible with the following interfaces, which may be selected by the customer:±8V-±16V double-end power supply and +14V-+28V single-end power supply; digital or analog signal input and output;

SEMI standard mechanical dimensions; and RS-485 or DeviceNetTM communications module.

4. Miscellaneous Functions

Powerful customer software comes standard with each model, while additional functions such as multi-gas,multi-range,auto-zero, alarms, soft start, and delay are available as customer selections.

Specification

Type

CS230A

Full scale range (N2)

(50,100,150,200,250,300) SLM

Accuracy

±1.0% S.P. (≥35% F.S.) ±0.35% F.S. (<35% F.S.)

Linearity

±0.5% F.S.

Repeatability

±0.2% F.S.

Response Time

≤2sec

Valve Rest Position

Normally Closed or Normally Open

No Valve

Differential Pressure

0.15~0.35MPa 50SLM≤Flow(N2)<150SLM
0.20~0.35MPa 150SLM≤Flow(N2)≤250SLM
0.25~0.40MPa 250SLM<Flow(N2)≤300SLM

50~100SLM:<0.02MPa > 100SLM:<0.05MPa

Temperature Coefficient

Zero:≤±0.05% F.S./℃; Span:≤±0.1% F.S./℃

Maximum Operating Pressure

1 MPa

Max Pressure

3 MPa (435pisg)

Zero Drift

<0.6%F.S. per year without autozero

Leak integrity

1×10-9 atm·cc / sec He

Wetted Materials

Viton; Neoprene

Operation Temperature

(5~45)℃

Input Signal

Digital: RS485 or DeviceNetTM or ProfiBus
Analog:(0~5)VDC or (4~20)mA

N/A

Output Signal

Digital: RS485 or DeviceNetTM or ProfiBus
Analog:(0~5)VDC or (4~20)mA

Power Supply

±8 ~ ±16 VDC or +14 ~ +28 VDC(400mA)

Electronic Connector

9 pin male sub-D ;15 pin male sub-D ; DeviceNetTM male; or ProfiBus

Fittings Compression Fittingφ6;Compression Fitting1/4´´;(available to Flow(N2)≤60SLM)
Compression Fittingφ8mm(available to Flow(N2)≤ 200SLM)
Compression Fitting φ10mm;Compression Fitting 3/8´´;Compression Fitting 1/2´´;VCR 1/2´´;
Weight

2.6kg

1.5kg

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