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Sevenstar Mass Flow Contoller
Sevenstar Mass Flow Controller CS330 MFC
  • Sevenstar Mass Flow Controller CS330 MFC

Sevenstar Mass Flow Controller CS330 MFC

The CS330C、D MFC/MFM incorporate a dual interface, voltage and current as well as RS-485,DeviceNet and ProfiBus digital interfaces. It is possible to operate the instrument completely digitally or it can be operated in analog mode with digital monitoring. CS330C、D series have wide range of power supply(available for ±8 ~ ±16 VDC or +14 ~ +28 VDC). In addition, autoAlarm, change of operating gas and range available through the digital interface. Customer Secondary Development of control and sample software is available through the open protocol.

Description

Specification

CS330C、D

Type

CS330C

CS330D

Valve Rest Position

Normally Closed

No Valve

Normally Closed

No Valve

Full scale range (N2)

(100,200) SLM

Accuracy

±1.0% S.P. (>35% F.S.)      ±0.35% F.S. (≤35% F.S.)

Linearity

±0.5% F.S.

Repeatability

±0.2% F.S.

Response Time

     ≤ 1 sec

Valve Rest Position

400 ~ 600  KPa

<0.03MPa

400 ~ 600  KPa

<0.03MPa

Differential Pressure

Zero: ≤±0.02% F.S./℃;Span:≤±0.1% F.S./℃

Maximum Pressure Working

0.6 MPa

Max Pressure

1 MPa  (435pisg)

Leak integrity

5 x 10-12 Pa·m3/ sec He (5 x 10-11 atm.cc/sec He)

Wetted Materials

Metal

Operation Temperature

(0~50)℃

Input Signal

Digital: RS485 or  DeviceNet or  EtherCAT
Analog:(0~5)VDCor  (4~20)mA

N/A

Digital: RS485 or  DeviceNet or  EtherCAT
Analog:(0~5)VDCor  (4~20)mA

N/A

Output Signal

Digital: RS485  or DeviceNet
Analog:(0~5)VDC or (4~20)mA

Zero Drift

<0.6%F.S. per year without autozero

Power Supply

±8 ~ ±16 VDC or +14 ~ +28 VDC(400mA)

surface chemical composition

Chromium/iron ratio>2.0; Chromium oxide thickness>20 angstroms

normalcy

Fittings

VCR 1/2´´

Electronic Connector

9 pin male sub-D ;15 pin male sub-D ; DeviceNetTM male ;EtherCAT

Surface Finish

5μinch Ra 25μinch Ra

Weight

1.8 Kg

1.6 Kg

1.8 Kg

1.6 Kg

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